C, H, N and O in Si and Characterization and Simulation of Materials and Processes
| By: | Borghesi, A.; Gösele, U.M.; Vanhellemont, J.; Gué, A.M.; Djafari-Rouhani, M. |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780444824134 |
| eText ISBN: | 9780444596338 |
| Edition: | 0 |
| Format: | Page Fidelity |
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